Anchor Electrostatic Plate SI. & Anchor
Channel as SEN Contact Beam——> [Ps ee Body NS Release Holes [SS] BEOL Metal i“) BEOL Metal Spacer Ss) BEOL Landing Pads
Contact “ Pair & RSS Channel Release Holes
Datasheet — Nem Relay Cad by CommunityCAD Archive
Anchor Electrostatic Plate SI. & Anchor
Channel as SEN Contact Beam——> [Ps ee Body NS Release Holes [SS] BEOL Metal i“) BEOL Metal Spacer Ss) BEOL Landing Pads
Contact “ Pair & RSS Channel Release Holes